Non-contact tweezers for high-temperature wafers
Heat-resistant tweezers for non-contact removal of wafers from a high-temperature susceptor.
A "non-contact tweezers" designed for high-temperature operation that allows for the non-contact removal of wafers from a hot susceptor after epitaxial film deposition on semiconductor wafers using a CVD apparatus. It features a handle equipped with a manual valve, enabling gas supply ON-OFF control through valve operation with a hand holding the handle, similar to using tweezers, while the wafers are suspended and transported by a "float chuck" that holds them non-contact by ejecting gas.
- Company:ソーラーリサーチ研究所 大阪事業所
- Price:Other